移動テーブル中央に開口(透過穴)を有したラインナップです。レーザ透過用や顕微鏡・分析機器と組み合わせた微細観察、高精度マッピング測定などに適しています。
Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.
Available from a compact to large openings
小型デバイスに適したコンパクトな開口からタイプから、大きなパネル基板をアライメントできる大開ロタイプも揃えています。
The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.
Smooth and accurate scanning
高精度フィードバック制御により、指令信号に従った信頼性の高い動作が行えます。
Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.
Classification of performances with two mechanisms
高い共振周波数を備え高速応答性重視の「直接駆動機構」と、ストロークを確保した「変位拡大機構」に分類されます。
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
Direct-drive mechanism
Displacement magnification mechanism
Applications
- 走査型プローブ顕微鏡
- 顕微鏡試料テーブル
- 分光分析機器
- 半導体、FPD関連装置
- 露光装置
- マッピング測定
- SPM,AFM
- Microscope tables
- Spectroscopic instruments
- Semiconductor & FPD-related inspections
- Photolithography systems, Exposure devices
- Mapping measurements
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型號
|
軸向
|
行程 |
解析度 |
反覆定位精度 |
共振周波數[Hz] |
載重 [N] |
外型尺寸 |
PK1L40-020U-N |
X |
- |
- |
- |
6600 |
5 |
40x70x10 |
PK1L60-030U |
X |
30 |
1 |
±1 |
2800 |
10 |
60×70×16 |
PK1L45-100U |
X |
100 |
2 |
±2 |
490 |
5 |
45×45×16 |
PK2H100-030U |
XY |
30 |
1 |
±1 |
2500 |
50 |
100×100×25 |
PK2H130-030U |
XY |
30 |
1 |
±1 |
1500 |
50 |
130×130×30 |
PK2H150-050U |
XY |
50 |
2 |
±2 |
1200 |
50 |
150×150×30 |
PK2L60-020U-N |
XY |
- |
- |
- |
1700 |
10 |
60x60x10 |
PK2L100-080U |
XY |
80 |
2 |
±2 |
530 |
10 |
100×100×30 |
PK2L64-100U |
XY |
100 |
2 |
±2 |
300 |
10 |
64×64×30 |
PK2L76F-100U |
XY |
100 |
2 |
±2 |
240 |
10 |
76×76×32 |
PK2L130-100U |
XY |
100 |
2 |
±2 |
580 |
10 |
130×130×30 |
PK2L150-100U |
XY |
100 |
2 |
±2 |
420 |
10 |
150×150×30 |
PK2L150-200U |
XY |
200 |
5 |
±5 |
370 |
10 |
150×150×30 |
PK2L150-300U |
XY |
300 |
10 |
±10 |
240 |
10 |
150×150×30 |
PK2L280-200U |
XY |
200 |
5 |
±5 |
150 |
20 |
280×280×28 |
PKVH60-012U |
Z |
12 |
1 |
±1 |
2500 |
10 |
60×60×36 |
PKVL64F-100U |
Z |
100 |
2 |
±2 |
480 |
10 |
64×64×30 |
PKVL100-100U |
Z |
100 |
2 |
±2 |
480 |
10 |
100×100×30 |
PKVL84F-300U |
Z |
300 |
10 |
±10 |
210 |
10 |
84×84×30 |
PKVL60-100U |
Z |
100 |
2 |
±2 |
380 |
5 |
74×60×22 |
PKVL60-200U |
Z |
200 |
5 |
±5 |
350 |
5 |
74×60×22 |
PKMVL160-200U |
Z |
200 |
5 |
±5 |
150 |
10 |
160×240×24 |
PK3H130-030UA |
XYZ |
(X,Y) 30、(Z) 20 |
1 |
±1 |
820 |
10 |
130×130×30 |
PK3H150-050U |
XYZ |
(X,Y) 50、(Z) 30 |
(X,Y) 2、 (Z) 1 |
(X,Y) ±2、(Z) ±1 |
670 |
10 |
150×150×30 |
PK3L150-100UA |
XYZ |
(X,Y) 100、(Z) 30 |
(X,Y) 2、 (Z) 1 |
(X,Y) ±2、(Z )±1 |
430 |
10 |
150×150×30 |
PK3L150-100U |
XYZ |
(X,Y) 100、(Z) 100 |
(X,Y) 2、 (Z) 2 |
(X,Y) ±2、(Z) ±2 |
350 |
10 |
150×150×30 |
PK3L150-200UA |
XYZ |
(X,Y) 200、(Z) 100 |
(X,Y) 5、 (Z) 2 |
(X,Y) ±5、(Z) ±2 |
280 |
10 |
150×150×30 |
PK3L150-300UA |
XYZ |
(X,Y) 300、(Z) 100 |
(X,Y) 10、(Z) 2 |
(X,Y) ±10、(Z) ±2 |
210 |
10 |
150×150×30 |
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